Validation of absolute planarity reference plates with a liquid mirror

Year: 2005

Authors: Vannoni M., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: The use of a simplified version of the liquid mirror approach to validate absolute planarity reference flats is described in detail. It is shown that the approach can serve the purpose, providing a measurement of the peak-to-valley departure from planarity that in experiments is within 7 nm uncertainty (2 sigma) over a diameter of 90 mm.

Journal/Review: METROLOGIA

Volume: 42 (5)      Pages from: 389  to: 393

KeyWords: optical surfaces; absolute planarity; flatness standards
DOI: 10.1088/0026-1394/42/5/008

Citations: 16
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