A fast versatile optical profilometer

Year: 1979

Authors: Arecchi F.T., Bertani D., Ciliberto S.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
Department of Physics, University of Firenze, 50125 Firenze, Italy

Abstract: We describe a new optical profilometer for the measurement of surface roughness of workpieces form the submicrometer range up to several tens of micrometers. The device has speed and sensitivity characteristics better than mechanical profilometers. It overcomes the randomness requirements which limit the use of optical devices working on angular diagrams or speckle correlation measurements

Journal/Review: OPTICS COMMUNICATIONS (PRINT)

Volume: 31 (3)      Pages from: 263  to: 266

KeyWords: optical profilometer
DOI: 10.1109/TIM.1983.4315039

Citations: 10
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