Digital holographic microscope for thermal characterization of silicon micro-hotplates for gas sensor
Year: 2004
Authors: Coppola G., De Nicola S., Ferraro P., Finizio A., Maccagnani P., Pierattini G.
Autors Affiliation: Istituto per la Microelettronica e i Microsistemi del CNR – Sez. di Napoli Via Diocleziano 328, 80124 Napoli, Italy;
Istituto di Cibernetica del CNR,“E. Caianiello” Via Campi Flegrei 34,80078 Pozzuoli (Na), Italy;
Istituto Nazionale di Ottica Applicata – Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (Na), Italy;
Istituto per la Microelettronica e i Microsistemi del CNR – Sez. di Bologna Via P. Gobetti, 101 I-40129, (Italy)
Abstract: Digital Holographic Microscope has been employed to obtain an accurate characterization of a micro-hotplate for gas sensing applications. The fabrication of these sensors needs different materials, with different properties and different technological processes, which involve high temperature treatments. Consequently, the structure is affected by the presence of residual stresses, appearing in form of undesired bowing of the membrane. Moreover, when the temperature of the sensor increases, a further warpage of the structure is observed. DHM allows to evaluate, with high accuracy, deformations due to the residual stress and how these deformations are affected by thermal loads. In particular, profiles of the structure have been evaluated both in quasi-static condition and the profile variation due to the biasing of the heater resistor has been measured.
Journal/Review: PROCEEDINGS OF SPIE
Volume: 5458 Pages from: 228 to: 235
KeyWords: Digital holography characterization; Silicon micro-hotplate; gas sensor; residual stress; DOI: 10.1117/12.546016Connecting to view paper tab on IsiWeb: Click here