Micro-temperature effects on absolute flatness test plates

Year: 1998

Authors: Greco V., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: High-sensitivity interferometric measurements on test plates are reported, showing peculiar variability maps of optical path difference. Micro-temperature deformations of the test plates are considered, accounting for the maps observed; orders of magnitude for the temperature disuniformities are evaluated. Thermal instabilities are pointed out as an effective limit to the feasibility and assessment of flatness etalons.


Volume: 7 (6)      Pages from: 1341  to: 1346

KeyWords: Flatness etalons; Micro-temperature deformation, Deformation; Testing; Thermal effects; Thermodynamic stability; Interferometers
DOI: 10.1088/0963-9659/7/6/012

Citations: 12
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