Absolute measurement of planarity with Fritz’s method: uncertainty evaluation

Year: 1999

Authors: Greco V., Tronconi R., Del Vecchio C., Trivi M., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy; Osservatorio Astrofisico di Arcetri. Largo E. Fermi 5, 50125 Firenze, Italy;
Centro de Investigaciones Opticas, Comision Investigaciones Cientificas Provincia Buenos Aires e Facultad de Ingenieria, Universidad La Plata, La Plata, Argentina

Abstract: Fritz’s method [Opt. Eng. 23, 379 (1984)] of using Zernike polynomials to assess the absolute planarity of test plates is revisited. A refinement is described that takes into account the data decorrelation that appears in experiments. An uncertainty balance is defined by propagation of error contributions through the steps of the method. The resultant measuring procedure is demonstrated on a data set from experiments, and a nanometer level of uncertainty is achieved.

Journal/Review: APPLIED OPTICS

Volume: 38 (10)      Pages from: 2018  to: 2027

KeyWords: optical surfaces; absolute planarity; calibration; optical testing; optical metrology
DOI: 10.1364/AO.38.002018

Citations: 31
data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2023-11-26
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