Scientific Results

Low loss optomechanical cavities based on silicon oscillator

Year: 2015

Authors: Borrielli A., Pontin A., Cataliotti F.S., Marconi L., Marin F., Marino F., Pandraud G., Prodi G.A., Serra E., Bonaldi M.

Autors Affiliation: Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division,
38123 Povo, Trento, Italy.
Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and
Application, I-38123 Povo, Trento, Italy.
Dipartimento di Fisica, Universià di Trento, I-38123 Povo, Trento, Italy.
Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto
Fiorentino (FI), Italy.
European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy.
INFN, Sezione di Firenze.
CNR-INO, L.go Enrico Fermi 6, I-50125 Firenze, Italy.
Dept. of Microelectronics and Computer Engineering /ECTM/DIMES, Delft University of
Technology, Feldmanweg 17, 2628 CT Delft, The Netherlands.

Conference title: Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems.
Proc. of SPIE 9517, 95171O-1 – 95171O-9
Place: Barcelona, Spain

KeyWords: optomechanics