INVESTIGATION OF NIO THIN FILM BY SPUTTERING FOR GAS SENSING APPLICATIONS

Year: 2014

Authors: Baratto C., Raj Kumar, Faglia G., Sberveglieri, G. Bontempi E. Borgese L.

Autors Affiliation: 1CNR-IDASC SENSOR Lab. and University of Brescia, Dept. of Information Engineering, Via Valotti, 9 25133 Brescia, Italy
2 INSTM and Chemistry for Technologies Laboratory, University of Brescia, Department of Mechanical and Industrial Engineering,Via Branze, 38 25133 Brescia, Italy

Journal/Review:

KeyWords: Gas sensing; NiO; sputtering