Monitoring the optical polishing process by speckle statistics

Year: 1993

Authors: Greco V., Molesini G., Quercioli F.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: The grade of optical finish of a surface being polished can be measured by its scattering properties. In coherent illumination a partially developed speckle field is obtained, whose standard deviation is related to the finish grade. Measurements are reported on a series of sample surfaces produced with a traceable procedure. The polishing rate is given with a simple model, and fitting to the data set is presented. Within the sensitivity of the measuring technique, a fair agreement between the model and the data is achieved.

Journal/Review: OPTIK

Volume: 93 (2)      Pages from: 73  to: 76

KeyWords: speckles; optical shop testing; optical metrology

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