Multiphase homodyne displacement sensor
Authors: Greco V., Iemmi C., Ledesma S., Mannoni A., Molesini G., Quercioli F.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: A four-channel homodyne interferometer is presented in which the phase is precisely detected to monitor the displacement of a test mirror with sub-nanometric accuracy. The optical configuration is of the Twyman-Green type, with a structured delay plate in one arm. The principle of operation and the measuring algorithm are described, and experimental results are presented.
Volume: 97 (1) Pages from: 15 to: 18
KeyWords: Algorithms; Mirrors; Optical design; Optical resolving power; Plates (structural components); Sensors; Signal detection; Delay plate; Multiphase homodyne displacement sensor; Optical configuration; Optical path difference; InterferometersCitations: 6data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2022-12-04References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here