Multiphase homodyne displacement sensor

Year: 1994

Authors: Greco V., Iemmi C., Ledesma S., Mannoni A., Molesini G., Quercioli F.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A four-channel homodyne interferometer is presented in which the phase is precisely detected to monitor the displacement of a test mirror with sub-nanometric accuracy. The optical configuration is of the Twyman-Green type, with a structured delay plate in one arm. The principle of operation and the measuring algorithm are described, and experimental results are presented.

Journal/Review: OPTIK

Volume: 97 (1)      Pages from: 15  to: 18

KeyWords: Algorithms; Mirrors; Optical design; Optical resolving power; Plates (structural components); Sensors; Signal detection; Delay plate; Multiphase homodyne displacement sensor; Optical configuration; Optical path difference; Interferometers

Citations: 6
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