Three-Channel homodyne interferometer
Authors: Greco V., Iemmi C., Ledesma S., Molesini G., Quercioli F., Varasi M.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
ALENIA, Rome 00131, Italy
Abstract: A three-channel homodyne interferometer based on a structured delay plate is described.
Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.
Journal/Review: APPLIED OPTICS (2004)
Volume: 33 (34) Pages from: 8115 to: 8116
KeyWords: Algorithms; Calibration; Data acquisition; Helium neon lasers; Mirrors; Optoelectronic devices; Personal computers; Photodetectors; Thermal expansion; Thin films; Corner cube reflector; Delay plate; Subnanometric sensitivity; Three channel homodyne interferometers; InterferometersDOI: 10.1364/AO.33.008115Citations: 4data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2023-12-03References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here