Three-Channel homodyne interferometer

Year: 1994

Authors: Greco V., Iemmi C., Ledesma S., Molesini G., Quercioli F., Varasi M.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
ALENIA, Rome 00131, Italy

Abstract: A three-channel homodyne interferometer based on a structured delay plate is described.
Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.

Journal/Review: APPLIED OPTICS (2004)

Volume: 33 (34)      Pages from: 8115  to: 8116

KeyWords: Algorithms; Calibration; Data acquisition; Helium neon lasers; Mirrors; Optoelectronic devices; Personal computers; Photodetectors; Thermal expansion; Thin films; Corner cube reflector; Delay plate; Subnanometric sensitivity; Three channel homodyne interferometers; Interferometers
DOI: 10.1364/AO.33.008115

Citations: 2
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