Accurate polarization interferometer

Year: 1995

Authors: Greco V., Molesini G., Quercioli F.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A polarization interferometer which measures optical path differences with improved accuracy control is presented. The approach makes use of four signals in quadrature, computing the phase with an algorithm insensitive to laser power drifts. Experimental results of the interferometer

Journal/Review: REVIEW OF SCIENTIFIC INSTRUMENTS

Volume: 66 (7)      Pages from: 3729  to: 3734

KeyWords: polarization interferometry; optical metrology; optical metrology
DOI: 10.1063/1.1145429

Citations: 47
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