Fabrication of microstructures by a new concept of 3D lithography
Year: 2011
Authors: Vespini V., Coppola S., Finizio A., Grilli S., Merola F., Ferraro P.
Autors Affiliation: Istituto Nazionale di Ottica INO-CNR
Abstract: We present a novel approach for fabricating a wide variety of soft solid-like microstructures, thus leading to a new concept in 3D lithography. A relatively easy to accomplish technique has been demonstrated for curing different transient stages ofpolymer fluids by rapid cross-linking of PDMS.
Journal/Review:
KeyWords: microstructures; microresonators; polymer; qds;