Calibration of horizontally-placed planarity standards

Year: 2008

Authors: Vannoni M., Molesini G.

Autors Affiliation: CNR-Istituto Nazionale di Ottica Applicata, Firenze

Abstract: Fused silica plates are used in most metrology laboratories as planarity standard. Usually, these standards are calibrated in upright position, to minimize bending effects due to gravity. On the other hand, for particular applications or very large flats, it would be useful to know the absolute surface error when they are supported in horizontal position, i.e., with their axis vertical. Here we report a study regarding this setup for planarity calibration, comparing two different experimental methods with respect to predictions of finite elements analysis. ©2008 IEEE.

Conference title: 2008 Conference on Precision Electromagnetic Measurements

KeyWords: Calibration; Electromagnetism; Finite element method; Silica; Silicate minerals; Silicon compounds; Standards, Bending effects; Electromagnetic measurements; Experimental methods; Finite elements analysis; Fused silica plates; Planarity; Surface errors; Upright position; Fused silica
DOI: 10.1109/CPEM.2008.4574718