Optical Micro-profilometry for Roughness Measurement

Year: 2007

Authors: Fontana R., Daffara C., Gambino M.C., Pampaloni E., Pezzati L.

Autors Affiliation: INOA-CNR Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Journal/Review:

KeyWords: Optical Microprofilometry; Roughness Measurement;