Absolute calibration of optical flats: long term reproducibility of interferometric measurements

Year: 2001

Authors: Greco V., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Conference title: 2nd International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Place: Turin

KeyWords: Metrology; optical testing; planarity