Focus-multiplexed optical profilometer

Year: 1984

Authors: Molesini G., Poggi P., Quercioli F., Wang S.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy; Shanghai Institute of Optics and Fine Mechanics, Shanghai, China

Abstract: Among the instrumental techniques for surface profiling of mechanical samples the optical approach is outstanding as it is non-contacting, versatile and fast. Optical profilometers usually focus the light at the surface of the sample under test and collect part of the back-diffused light. In this work wavelength encoding is described along with spectrographic detection, allowing for surface localization in depth without parts in oscillation.

Conference title: The 13th Congress of the International Commission for Optics (ICO-13)

KeyWords: Mechanical samples; Profilometerw; Spectrografic detection; Surface Location; Suface profiling; Wavelength encoding; Optical instruments