Four-channel interferometric displacement sensor
Authors: Greco V., Iemmi C., Ledesma S., Mannoni A., Molesini G., Quercioli F.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: An interferometric proximity sensor is described, working on a set of four interference patterns in quadrature. The measuring algorithm precisely evaluates a phase angle, that is used to monitor the displacement of a test sample.
KeyWords: Algorithms; Distance measurement; Focusing; Interferometry; Light interference; Light measurement; Monitoring; Phase measurement; Piezoelectric transducers; Four channel interferometric displacement sensors; Four interference patterns; Phase angle; Phase quadrature; Proximity sensorsCitations: 1data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2023-01-29References taken from IsiWeb of Knowledge: (subscribers only)