Four-channel interferometric displacement sensor

Year: 1993

Authors: Greco V., Iemmi C., Ledesma S., Mannoni A., Molesini G., Quercioli F.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: An interferometric proximity sensor is described, working on a set of four interference patterns in quadrature. The measuring algorithm precisely evaluates a phase angle, that is used to monitor the displacement of a test sample.

Conference title:

KeyWords: Algorithms; Distance measurement; Focusing; Interferometry; Light interference; Light measurement; Monitoring; Phase measurement; Piezoelectric transducers; Four channel interferometric displacement sensors; Four interference patterns; Phase angle; Phase quadrature; Proximity sensors

Citations: 1
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