Measuring the absolute planarity of test plates with a modified Fritz’s method

Year: 1999

Authors: Greco V., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: The Fritz

Conference title:

KeyWords: Correlation methods; Interferometry; Polynomials; Probability; Absolute planarity; Fritz method; Zernike polynomials, Optical devices

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