Nanometre scale 3D nanomechanical imaging of semiconductor structures from few nm to sub-micrometre depths

Year: 2015

Authors: Kolosov O.V., Dinelli F., Robson A., Krier A., Hayne M., Fal’ko VI., Henini M.

Autors Affiliation: Univ Lancaster, Dept Phys, Lancaster LA1 4YB, England;‎ CNR INO, Pisa, Italy; Univ Nottingham, Sch Phys & Astron, Nottingham, England

Abstract: N.A.

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KeyWords: FORCE MICROSCOPY; SUBSURFACE