Absolute measurement of planarity: pixel versus Zernike data analysis

Year: 2001

Authors: Greco V., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: Relating two different methods of data analysis for assessing the absolute planarity of reference flats is reported. Considered methods are based on Zernike representation and pixel handling, respectively. Operations to be implemented on interferometric systems to use the same data set for comparative processing are described.

Conference title:

KeyWords: Calibration; Data reduction; Least squares approximations; Polynomials; Surface measurement; Absolute planarity measurement; Dimensional metrology; Zernike polynomial representation; Interferometry
DOI: 10.1117/12.445632

Connecting to view paper tab on IsiWeb: Click here