Focus-wavelength encoded optical profilometer
Year: 1984
Authors: Molesini G., Pedrini G., Poggi P., Quercioli F.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: An optical profilometer is presented working on the principle of focus multiplexing by wavelength encoding. Decoding is performed by lateral dispersion. A detector array shows up a signal distribution whose features accurately monitor the surface position of the sample under test. Versatility, accuracy and dynamical range are the most interesting characteristics of this approach.
Journal/Review: OPTICS COMMUNICATIONS
Volume: 49 (4) Pages from: 229 to: 233
KeyWords: Optical profilometry; Chromatic sensors; Optical instrumentsDOI: 10.1016/0030-4018(84)90179-2Citations: 144data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-10-27References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here