Cu/Pd thin-film thermopile as a temperature and hydrogen sensor
Year: 1990
Authors: Baciocchi M., A. Bearzotti, Gentili M., Lucchesini A., Caliendo C., Verona E., D’amico A.
Autors Affiliation: IESS – CNR – Roma – Italy; IDAC – CNR – Roma – Italy; Università di Roma II \’Tor Vergata\’, Dip. Ing. Elettronica, Roma – Italy
Abstract: This paper illustrates the experimental performance of a thermopile made by five Cu/Pd thermocouples (Junction area 200 x 200 µm) which shows sensitivity to both temperature and hydrogen and has a relatively low Johnson noise. The thermoelectric power of the elementary thermocouple IS a few µV/K The H2, responsivity in a H2 + N2 flux is found to be dependent on the temperature difference T2 – T1 between the two thermocouple Junctions and on the H2, concentration. With T2 – T1, equal to 100 K, T2 equal to 373 K and a H2, concentration of 88 ppm in N2, the thermopile gives a responsivity of about 750 nV/(ppm of H2). Response times depend on the temperature of both junctions and the hydrogen concentration in the H2 + N2 mixture and are mainly related to the adsorption- desorption processes of the Pd film itself. Data on the responsivity dependence versus H2 concentration and versus T2 – T1, are given and discussed. Noise problems are finally taken into account in order to consider the noise equivalent H2 concentration NE_H2.
Journal/Review: SENSORS AND ACTUATORS A-PHYSICAL
Volume: 22 (1-3) Pages from: 631 to: 635
More Information: doi: 10.1016/0924-4247(89)80047-0KeyWords: thermopile; H2; sensors; Pd; DOI: 10.1016/0924-4247(89)80047-0Citations: 3data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-04-14References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here