Monitoring the optical polishing process by speckle statistics
Autori: Greco V., Molesini G., Quercioli F.
Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: The grade of optical finish of a surface being polished can be measured by its scattering properties. In coherent illumination a partially developed speckle field is obtained, whose standard deviation is related to the finish grade. Measurements are reported on a series of sample surfaces produced with a traceable procedure. The polishing rate is given with a simple model, and fitting to the data set is presented. Within the sensitivity of the measuring technique, a fair agreement between the model and the data is achieved.
Volume: 93 (2) Da Pagina: 73 A: 76
Parole chiavi: speckles; optical shop testing; optical metrologyLink per visualizzare la scheda su IsiWeb: Clicca qui