Calibration of horizontally-placed planarity standards
Anno: 2008
Autori: Vannoni M., Molesini G.
Affiliazione autori: CNR-Istituto Nazionale di Ottica Applicata, Firenze
Abstract: Fused silica plates are used in most metrology laboratories as planarity standard. Usually, these standards are calibrated in upright position, to minimize bending effects due to gravity. On the other hand, for particular applications or very large flats, it would be useful to know the absolute surface error when they are supported in horizontal position, i.e., with their axis vertical. Here we report a study regarding this setup for planarity calibration, comparing two different experimental methods with respect to predictions of finite elements analysis. ©2008 IEEE.
Titolo Convegno: 2008 Conference on Precision Electromagnetic Measurements
Luogo:
Parole chiavi: Calibration; Electromagnetism; Finite element method; Silica; Silicate minerals; Silicon compounds; Standards, Bending effects; Electromagnetic measurements; Experimental methods; Finite elements analysis; Fused silica plates; Planarity; Surface errors; Upright position; Fused silicaDOI: 10.1109/CPEM.2008.4574718