Focus-multiplexed optical profilometer

Anno: 1984

Autori: Molesini G., Poggi P., Quercioli F., Wang S.

Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy; Shanghai Institute of Optics and Fine Mechanics, Shanghai, China

Abstract: Among the instrumental techniques for surface profiling of mechanical samples the optical approach is outstanding as it is non-contacting, versatile and fast. Optical profilometers usually focus the light at the surface of the sample under test and collect part of the back-diffused light. In this work wavelength encoding is described along with spectrographic detection, allowing for surface localization in depth without parts in oscillation.

Titolo Convegno: The 13th Congress of the International Commission for Optics (ICO-13)
Luogo:

Parole chiavi: Mechanical samples; Profilometerw; Spectrografic detection; Surface Location; Suface profiling; Wavelength encoding; Optical instruments