Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method
Anno: 2005
Autori: de Angelis M., De Nicola S., Ferraro P., Finizio A., Grilli S., Pierattini G.
Affiliazione autori: Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto Nazionale di Ottica Applicata, Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy
Abstract: Phase shifting interferometry is a preferred technique for high-resolution phase profile measurement, but the difficulty in generating the requested shifted pattern has limited the use of the technique to low-noise environment and in case accurate calibration of the phase shifting device is available. In the present experiment, a sample having one-dimensional straight phase boundary is mounted in one arm of an interferometer. One single image of the fringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of the sample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern. (c) 2005 Elsevier Ltd. All rights reserved.
Giornale/Rivista: OPTICS AND LASERS IN ENGINEERING
Volume: 43 (12) Da Pagina: 1305 A: 1314
Parole chiavi: optical measurement; image processing; DOI: 10.1016/j.optlaseng.2005.01.003Citazioni: 8dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-05-12Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui